| Abstract: | Implantable biomedical devices generally comprise
MEMS-type sensors used to acquire physiological signals, as well
as CMOS electronics to perform powering, signal conditioning and
data transmission. Among their requirements, reliability over an
extended period of time ought to be spotlighted. Thus, modeling
and realistic fault injection is essential to improve their long-term
results. This work targets the development of a fault model for
MEMS capacitive pressure sensors, to be part of smart stents with
arterial blockage detection capabilities. The deflection profile of
circular and square-shaped diaphragms under fault-free conditions
has been analytically modeled. However, analytical models are
inaccurate to describe the behavior of diaphragms under faulty
conditions, which alter the geometry or material properties of the
sensor. In these cases, the use of FE analysis tools is necessary to
build a realistic fault model library, together with a comprehensive
MEMS testing approach. |
