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| GIM>Research>Publication |
| PUBLICATION |
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| Full record |
| Title: | CMD, AN AUTOMATED DESIGN TOOL FOR BLOOD PRESSURE SENSING CAPACITIVE MEMS |
| Type: | International Conference |
| Where: | Proceedings of the 26th micromechanics and microsystems Europe Workshop |
| Date: | 2015-09 |
| Authors: |
David Rivas
Jose Angel Miguel
Yolanda Lechuga
Miguel Angel Allende
Mar Martínez
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| R&D Lines: |
Test methods of digital and mixed integrated circuits
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| Projects: |
Extensión de la actividad útil de los stent cardiovasculares inteligentes...
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| ISBN: | |
| PDF File: |
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| Abstract: | Implantable biomedical devices may comprise MEMS-type sensors used to acquire physiological signals, as well as CMOS electronics to perform powering, signal conditioning and data transmission. This work targets the development of a new capaci-tive MEMS pressure sensor modeling tool, to provide an initial sensor design based on a set of user-specified input constraints. This tool generates two output folders with all the files required to perform an electromechanical analysis of the sensor, as well as to create a layout cell ready to be included in a larger design. |
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